Sweeping the tilt angle can improve film thickness uniformity and sidewall coverage though also keeping away from high energy-reflected neutral species for vital processes.
In-situ optical monitoring and control is out there by Angstrom’s optical monitoring & control offer.
Concentrate on rotation and carousel indexing Just about every have torque sense, blocking any approach complications as a consequence of slips or jams in rotation.
In-situ ellipsometry offers important information on the performance of the optical film while it's currently being deposited.
Our Reticle® ion beam sputter deposition units are designed and engineered to build exact optical movies of the best purity, density, and security.
Variable angle levels allow for extremely effective thin movie approaches. Even so, one of its most significant troubles is reproducibility. The substrate is usually established at an extremely oblique angle in relation to the resource, and also the films are quite delicate to your precision of the angle.
Angstrom went to fantastic lengths to refine the tolerances of the tilt angle, bettering it from a variation of as many as an entire diploma on non-Angstrom systems I’ve accustomed to below 0.
Typically, a QCM is accustomed to calibrate an First deposition charge ahead of completing the layer thickness beneath time control with a fixed beam recent. Shuttering the crystal will drastically extend its functioning life time during prolonged processes or on techniques using a load lock.
IBSD processes may hire a secondary ion supply for substrate cleansing and energetic assist, substrate heating High-purity metal products for reactive deposition, and in-situ optical monitoring or ellipsometry for important layer thickness termination.
All conventional Reticle® platforms include things like an additional gridless finish-Hall ion resource with hollow cathode neutralizer.
The deposition ion resource is directed toward a cloth focus on which has been optimized in both of those dimensions and position for your necessary deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition necessities and geometry of your procedure.
A reduced-frequency neutralizer makes certain secure beam operation without having contamination from a traditional filament.
A shuttered QCM located near the substrate supplies comments over the deposition fee and Bodily thickness on the rising movie.
Each and every axis of motion is managed by means of Aeres® applying precision servo motors, offering better than 0.1 degrees of positional accuracy. Front facet infrared heating bulbs tilt with the phase to offer a consistent temperature profile for reactive processes.